PHYS 595. Nanofabrication. 4 Credits.
This course introduces students to the design and fabrication of micro- and nanoscale devices. The course will cover fundamental fabrication principles, including optical and electron-beam lithography, thin-film deposition, etching, and characterization. This framework will aid in understanding the processes used in manufacturing chip-based devices in semiconductor electronics, photonics, micro/nano-electromechanical systems, microwave electronics, microfluidics, and superconducting quantum circuits. In the hands-on lab component of this course, students will learn build, optimize and better understand these systems and fabrication processes through the statistical design and analysis of experiments (i.e. Design of Experiments, DOE).